Silicon MEMS for Photonic Bandgap Devices

Tunable photonic bandgap structures for optical interconnects

As continued progress towards faster, low power consuming microelectronic devices becomes increasing difficult due to the scaling challenges of electrical interconnects, it becomes even more critical to explore alternative technologies. Tunable porous silicon photonic bandgap structures are viable building blocks for optical interconnects, which present a possible long term solution to the inte...

SIlicon Photonic Devices for Optoelectronic Integrated Circuits

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Combined Wet and Dry Etching for High-Precision Silicon Photonic Bandgap Devices

Thermal tuning of silicon-based one-dimensional photonic bandgap structures

Thermal tuning of silicon-based one-dimensional photonic bandgap microcavities is demonstrated. Thermally induced spectral shifts are caused by both the host silicon matrix and the optically active material infiltrated inside the photonic bandgap structures. The active material leads to the dominant thermal tuning contribution but the effect of the silicon matrix cannot be neglected. The intera...

Biosensing using Porous Silicon Photonic Bandgap Structures

Photonic bandgap (PBG) structures have remarkable optical properties that can be exploited for biosensing applications. We describe the fabrication of 1-D PBG biosensors using porous silicon. The optical properties of porous silicon PBGs are sensitive to small changes of refractive index in the porous layers, which makes them a good sensing platform capable of detecting binding of the target mo...